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Varian Vacuum System PDF Print E-mail

vacuum



Manufacturer

Varian

Model

Turbo Mini Turbo V-70 Mini Pumping Station

Instrument Type

Thermal Vacuum Deposition System

Description

High vacuum turbo molecular pump pumping system capable of applications such as high vacuum research, sample preparation, and thin film deposition.

Key Features

Thermal evaporation and deposition, high vacuum bell jar chamber, 40-280 L/sec pumping capacity.

Material Restrictions

Sample must be dry, and low outgassing substrates, and be stable under mechanical vacuum.

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