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Hummer VI Sputter Coater PDF Print E-mail

sputter_coater



Manufacturer

Technics

Model

Hummer VI

Instrument Type

Sputter Coater

Description

Deposits a conductive thin film coating. Sputter deposition is usually uniform and reproducible, yielding fine grain, adherent films. Used for SEM sample prep.

Key Features

Average deposition thickness of 300 Å Au, up to 9 samples at a time.

Material Restrictions

Sample must be dry, and low outgassing substrates, and be stable under mechanical vacuum.


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